Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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08821334
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Filing Dt:
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03/20/1997
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Inventors:
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SHINGO KADOMURA, TOMOHIDE JOZAKI, SHINSUKE HIRANO, KINYA MIYASHITA, SEIICHIROU MIYATA et al
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Title:
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STATIC ELECTRICITY CHUCK AND WAFER STAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-35 KITASHINAGWA 6-CHOME, SHINAGWA-KU |
| TOKYO, JAPAN |
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| HILL, STEADMAN & SIMPSON, P.C. |
| LEWIS T. STEADAMN |
| 85TH FLOOR SEARS TOWER |
| 233 S. WACKER DRIVE |
| CHICAGO, IL 60606 |
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