Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/23/1999
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Application #:
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08902193
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Filing Dt:
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07/29/1997
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Inventors:
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AKIRA KAWAKAWAGUCHI, SHIGERU KIMURA, AKIHITO YANOO, MASAO TAKADA, SHOJI TSURUTA et al
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Title:
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METHOD AND APPARATUS FOR POLISHING CHAMFERS OF SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-5-1, OHTEMACHI |
| CHIYODA-KU, TOKYO, JAPAN |
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| 1-5-1, OHTEMACHI |
| CHIYODA-KU, TOKYO, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND ET AL. |
| C. IRVIN MCCLELLAND |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VA 22202 |
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