Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08499986
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Filing Dt:
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07/10/1995
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Inventors:
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KRISTIAN E. JOHNSGARD, BRAD S. MATTSON, JAMES MCDIARMID, VLADIMIR J. ZEITLIN
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Title:
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SYSTEM AND METHOD FOR THERMAL PROCESSING OF A SEMICONDUCTOR SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3550 WEST WARREN AVENUE |
| FREMONT, CALIFORNIA 94538 |
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| MICHAEL J. MURPHY |
| WILSON, SONSINI, GOODRICH ET AL. |
| FH1-2 |
| 650 PAGE MILL ROAD |
| PALO ALTO, CA 94304-1050 |
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