Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08824467
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Filing Dt:
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03/26/1997
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Inventors:
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SABURO KAMIYA, NAOYUKI KOBAYASHI
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Title:
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METHODS TO CONTROL THE ENVIRONMENT AND EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-3, NISHI-OHI 1-CHOME SHINAGAWA-KU |
| TOKYO 140, JAPAN |
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| KECK, MAHIN & CATE |
| ROBERT J. SCHNEIDER, P.C. |
| P.O. BOX 06110 |
| CHICAGO, IL 60606-0110 |
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