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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/21/1999
Application #:
08917853
Filing Dt:
08/27/1997
Inventors:
MASARU NYUI, MIKICHI BAN
Title:
METHOD AND APPARATUS FOR MEASURING FILM THICKNESS AND FILM THICKNESS DISTRIBUTION DURING POLSIHING
Assignment: 1
Reel/Frame:
009050/0863Recorded: 03/16/1998Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/04/1998
Exec Dt:
02/04/1998
Assignee:
3-30-2 SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondent:
FITZPATRICK CELLA, HARPER, ET AL
SCOTT D. MALPEDE
277 PARK AVENUE
NEW YORK, NEW YORK 10172-0194

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