Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/28/1999
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Application #:
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08987597
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Filing Dt:
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12/09/1997
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Inventor:
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SHIGEKI WADA
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF IMPROVING ETCHING RATE RATIO OF INSULATOR TO REFRACTORY METAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-1, SHIBA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| HAYES, SOLOWAY, HENNESSEY, ET AL. |
| NORMAN P. SOLOWAY |
| 175 CANAL STREET |
| MANCHESTER, NEW HAMPSHIRE 03101 |
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