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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/28/1999
Application #:
08911878
Filing Dt:
08/13/1997
Inventors:
YAN YE, ALLEN ZHAO, XIANCAN DENG, DIANA MA
Title:
COPPER ETCH USING HCI AND HBR CHEMISTRY
Assignment: 1
Reel/Frame:
008772/0293Recorded: 08/15/1997Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/13/1997
Exec Dt:
08/13/1997
Exec Dt:
08/13/1997
Exec Dt:
08/13/1997
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
SHIRLEY L. CHURCH, ESQ.
PATENT COUNSEL
P.O. BOX 450-A
SANTA CLARA, CA 95052

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