Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/04/2000
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Application #:
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08869200
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Filing Dt:
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06/04/1997
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Inventor:
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MASAYASU SUZUKI
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Title:
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METHOD AND APPARATUS FOR FORMING THIN FILMS USING DUAL ECR PLASMA GENERATERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NAKAGYO-KU |
| 1 NISHINOKYO-KUWABARACHO |
| KYOTO 604, JAPAN |
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| MAJESTIC, PARSONS, SIEBERT & HSUE |
| KEIICHI NISHIMURA |
| FOUR EMBARCADERO CENTER, STE. 1100 |
| SAN FRANCISCO, CA 94111-4106 |
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