Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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08887034
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Filing Dt:
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07/02/1997
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Inventors:
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CHIA-SHIUNG TSAI, KUEI-YING LEE, HUN-JAN TAO
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Title:
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METHOD OF OXIDE ETCHING WITH HIGH SELECTIVITY TO SILICON NITRIDE BY USING POLYSILICON LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 9 CREATION RD. 1, SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN |
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| CHRISTENSEN O'CONNOR JOHNSON & KINDNESS |
| CHUN M. NG, ESQ. |
| 1420 FIFTH AVENUE, SUITE 2800 |
| SEATTLE, WA 98101-2347 |
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