Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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09305091
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Filing Dt:
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05/03/1999
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Inventors:
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ARTHUR H. SATO, XUE-YU QIAN
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Title:
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INDUCTIVELY COUPLED PLASMA REACTOR WITH AN INDUCTIVE COIL ANTENNA HAVING INDEPENDENT LOOPS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT-M/S 2061 |
| PO BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| PO BOX 450A |
| LEGAL AFFAIRS DEPARTMENT - M/S 2061 |
| SANTA CLARA, CA 95052 |
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