Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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08792082
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Filing Dt:
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01/31/1997
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Inventors:
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NAFTALI ELIAHU LUSTIG, WILLIAM L. GUTHRIE, THOMAS E. SANDWICK
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Title:
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METHOD AND APPARATUS FOR IN-LINE OXIDE THICKNESS DETERMINATION IN CHEMICAL-MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| INTELLECTUAL PROPERTY LAW DEPT., EAST FISHKILL FACILITY, 1580 ROUTE 52, HOPEWELL JUNCTION, NY 12533-6531 |
| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM CORPORATION, IP LAW DEPARTMENT |
| SUSAN M, MURRAY |
| EAST FISHKILL FACILITY |
| 1580 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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