Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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09156581
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Filing Dt:
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09/18/1998
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Inventor:
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STEVEN LEE SZETSEN
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Title:
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SIMULTANEOUS IN-SITU OPTICAL SENSING OF PRESSURE AND ETCH RATE IN PLASMA ETCH CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| INDUSTRIAL PARK |
| NO.2, R&D RD., VI, SCIENCE-BASED |
| HSINCHU, TAIWAN |
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| W. WAYNE LIAUH |
| LAW OFFICE OF LIAUH AND ASSOCIATES |
| 4224 WAIALAE AVE., SUITE 5-388 |
| HONOLULU, NI 96816 |
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