Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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09189429
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Filing Dt:
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11/10/1998
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Inventors:
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HIROYUKI AKATSU, SOICHI NADAHARA
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Title:
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WAFER CLEANING SYSTEM WITH PROGRESSIVE MEGASONIC WAVE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 72, KORIKAWA-CHO, SAIWAI-KU, KAWASAKI-SHI |
| KANAGAWA-KEN, JAPAN |
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| IBM CORPORATION |
| STEVEN CAPELLA |
| INTELLECTUAL PROPERTY DEPARTMENT |
| 1580 ROUTE 52, DEPT. 186 / BLDG. 300-482 |
| HOPEWELL JUNCTION, NY 12533 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| INTERNATIONAL BUSINESS MACHINES CORP. |
| STEVEN CAPELLA |
| INTELLECTUAL PROPERTY LAW DEPT. |
| 1580 RT. 52, DEPT. 18G, BLDG. 300-482 |
| HOPEWELL JUNCTION, NY 12533 |
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