Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/15/2000
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Application #:
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09055433
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Filing Dt:
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04/06/1998
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Inventors:
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CHAO-CHENG CHEN, CHIA-SHIUNG TSAI, HUN-JAN TAO
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Title:
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METHOD FOR ETCHING RELIABLE SMALL CONTACT HOLES WITH IMPROVED PROFILES FOR SEMICONDUCTOR INTEGRATED CIRCUITS USING A CARBON DOPED HARD MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 121 PARK AVE. 3 |
| HSIN-CHU, TAIWAN R.O.C |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000, WEN XIANG RD., SONGJIANG |
| SHANGHAI, CHINA 201616 |
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| MCCLURE, QUALEY & RODACK, LLP |
| 400 INTERSTATE NORTH PARKWAY SE |
| SUITE 200 |
| ATLANTA, GA 30339 |
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