Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/15/2000
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Application #:
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09019049
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Filing Dt:
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02/05/1998
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Inventors:
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HIROSHI SHIRAI, KENJI AKAI, TOSHIO ABE, CHIKARA TOJIMA, KATSUYUKI IWATA
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Title:
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METHOD FOR MEASURING EPITAXIAL FILM THICKNESS OF MULTILAYER EPITAXIAL WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 26-2, NISHI-SHINJUKU, 1-CHOME, SHINJUKU-KU |
| TOKYO, JAPAN 163 |
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| FOLEY & LARDNER |
| RICHARD L. SCHWAAB |
| 3000 K STREET, N.W. |
| SUITE 500 |
| WASHINGTON, D.C. 20007-5109 |
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