Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/22/2000
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Application #:
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09083596
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Filing Dt:
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05/22/1998
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Inventors:
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MARK D. LEHMAN, DORMAN RAINES, CHARLES A. STAMPS
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Title:
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PLASMA ETCHING APPARATUS AND METHOD AND APPARATUS FOR VERIFYING A WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2410 W. 14TH ST. |
| TEMPE, ARIZONA 85281 |
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| ROBERT A. PARSONS |
| 340 E PALM LN |
| SUITE 260 |
| PHOENIX, AZ 85004 |
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