Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/14/2000
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Application #:
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08828507
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Filing Dt:
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03/31/1997
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Inventors:
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WILLIAM S. KENNEDY, ALBERT J. LAMM, THOMAS E. WICKER, ROBERT A. MARASCHIN
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Title:
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METHOD AND APPARATUS FOR CONTROL OF DEPOSIT BUILD-UP ON AN INNER SURFACE OF A PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BURNS, DOANE, SWECKER & MATHIS, L.L.P. |
| JAMES W. PETERSON |
| P.O. BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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