Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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09041099
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Filing Dt:
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03/12/1998
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Inventors:
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AKIYOSHI CHAYAHARA, YUJI HORINO, ATSUSHI KINOMURA, NOBUTERU TSUBOUCHI, KANENAGA FUJII
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Title:
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METHOD OF FORMING A HIGHLY PURE THIN FILM AND APPARATUS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, KASUMIGASEKI 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| NIKAIDO, MARMELSTEIN, MURRAY & ORAM LLP |
| GEORGE E. ORAM, JR. |
| METROPOLITAN SQUARE, 655 15TH ST. N.W. |
| SUITE 330 - G STREET LOBBY |
| WESHINGTON, D.C. 20005-5701 |
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