Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/21/2000
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Application #:
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09018852
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Filing Dt:
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02/04/1998
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Inventors:
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SATOSHI KOMIYA, NAOKI AWAJI
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Title:
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ELEMENT CONCENTRATION MEASURING METHOD AND APPARATUS, AND SEMICONDUCTOR DEVICE FABRICATION METHOD AND APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NAKAHARA-KU, KAWASAKI-SHI |
| 1-1, KAMIKODANAKA 4-CHOME |
| KANAGAWA 211-8588, JAPAN |
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| STAAS & HALSEY |
| GEORGE N. STEVENS |
| 700 ELEVENTH STREET, N.W. |
| SUITE 500 |
| WASHINGTON, DC 20001 |
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