Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/02/2000
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Application #:
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08782169
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Filing Dt:
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01/14/1997
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Inventors:
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QUANYUAN SHANG, ROBERT MCCORMICK ROBERTSON, KAM S. LAW, DAN MAYDAN
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Title:
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APPARATUS AND METHOD FOR WHITE POWDER REDUCTION IN SILICON NITRIDE DEPOSITION USING REMOTE PLASMA SOURCE CLEANING TECHNOLOGY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 1, 7 BAN 2-CHOME, NISHISHINJUKU |
| TOKYO, JAPAN |
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| APPLIED MATERIALS, INC. |
| MARK D. WIECZOREK |
| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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