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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/16/2000
Application #:
09240110
Filing Dt:
01/29/1999
Inventors:
CHI-WEI CHANG, CHUNG-YI LEE
Title:
APPARATUS FOR DETECTING WAFER EDGE DEFECTS AND METHOD OF USING
Assignment: 1
Reel/Frame:
009770/0279Recorded: 01/29/1999Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/09/1998
Exec Dt:
11/09/1998
Assignee:
NO. 121, PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK
HSIN-CHU, TAIWAN R.O.C
Correspondent:
TUNG & ASSOCIATES
RANDY W. TUNG
838 W. LONG LAKE ROAD
BLOOMFIELD HILLS, MICHIGAN 48032

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