Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/16/2000
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Application #:
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08938206
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Filing Dt:
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09/26/1997
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Inventors:
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THOMAS J. CLEARY, JAMES C. WING
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Title:
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APPARATUS FOR BACKSIDE AND EDGE EXCLUSION OF POLYMER FILM DURING CHEMICAL VAPOR DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| SKJERVEN, MORRILL, MACPHERSON ET AL. |
| DAVID E. STEUBER |
| 25 METRO DRIVE, STE. 700 |
| SAN JOSE, CA 95110 |
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