Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/30/2000
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Application #:
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08767009
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Filing Dt:
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12/16/1996
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Inventors:
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SIMON YEW-MENG CHOOI, JIA Z. ZHENG, LAP CHAN
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Title:
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METHOD FOR PLANARIZING A LOW DIELECTRIC CONSTANT SPIN-ON POLYMER USING NITRIDE ETCH STOP
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SINGAPORE SCIENCE PARK |
| NO. 2, SCIENCE PARK DRIVE |
| SINGAPORE, SINGAPORE |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
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