Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/06/2000
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Application #:
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08942582
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Filing Dt:
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10/02/1997
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Inventors:
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STEVE GHANAYEM, MORRIS KORI, MAITREYEE MAHAJANI, RAVI RAJAGOPALAN
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Title:
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NON-PLASMA HALOGENATED GAS FLOW TO PREVENT METAL RESIDUES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| SCOTT W. HEWETT |
| PATENT COUNSEL |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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