Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/20/2000
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Application #:
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09336552
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Filing Dt:
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06/19/1999
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Inventors:
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MING-SHENG YANG, HSUEN-CHUNG CHEN, TSANG-JUNG LIN, JUAN-YUAN WU
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Title:
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CHEMICAL-MECHANICAL POLISHING STATION WITH END-POINT MONITORING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK, |
| NO. 3, LI-HSIN RD. II, |
| HSINCHU, TAIWAN |
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| MARTINE PENILLA & KIM, LLP |
| PETER B. MARTINE |
| 830 WEST EVELYN AVENUE |
| SUNNYVALE, CALIFORNIA 94086 |
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