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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
6091045
Issue Dt:
07/18/2000
Application #:
08952779
Filing Dt:
11/26/1997
Inventors:
HIROSHI MABUCHI, JUNYA TSUYUGUCHI, KATSUO KATAYAMA, TOSHIHIRO HAYAMI, HIDEO IDA et al
Title:
PLASMA PROCESSING APPARATUS UTILIZING A MICROWAVE WINDOW HAVING A THINNER INNER AREA
Assignment: 1
Reel/Frame:
008934/0930Recorded: 11/26/1997Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MABUCHI, HIROSHI
Exec Dt:
11/11/1997
TSUYUGUCHI, JUNYA
Exec Dt:
11/11/1997
KATAYAMA, KATSUO
Exec Dt:
11/17/1997
HAYAMI, TOSHIHIRO
Exec Dt:
11/11/1997
IDA, HIDEO
Exec Dt:
11/10/1997
MURAKAMI, TOMOMI
Exec Dt:
11/13/1997
TAKEDA, NAOHIKO
Exec Dt:
11/17/1997
Assignee:
SUMITOMO METAL INDUSTRIES, LTD.
5-33, KITAHAMA 4-CHOME, CHUO-KU
OSAKA-SHI, OSAKA 541, JAPAN
Correspondent:
ARMSTRONG, WESTERMAN, HATTORI, ET AL.
LE-NHUNG MCLELAND
STE. 1000
1725 K STREET, N.W.
WASHINGTON, DC 20006
Assignment: 2
Reel/Frame:
011862/0827Recorded: 06/05/2001Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
SUMITOMO METAL INDUSTRIES, LTD
Exec Dt:
05/15/2001
Assignee:
TOKYO ELECTRON LIMITED
MINATO-KU,
3-6, AKASAKA 5-CHOME
TOKYO 107-8481, JAPAN
Correspondent:
ARMSTRON, WESTERMAN ET AL.
WILLIAM G. KRATZ, JR.
1725 K ST, NW, STE 1000
WASHINGTON, DC 20006

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