Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/01/2000
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Application #:
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08951112
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Filing Dt:
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10/15/1997
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Inventor:
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TSUKASA AZUMA
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Title:
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PATTERN FORMING METHOD USING CHEMICALLY AMPLIFIED RESIST AND APPARATUS FOR TREATING CHEMICALLY AMPLIFIED RESIST
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 72 HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, JAPAN |
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| BANNER & WITCOFF, LTD. |
| JOSEPH M. POTENZA, ESQ. |
| 1001 G STREET, N.W., 11TH FLOOR |
| WASHINGTON, D.C. 20001-4597 |
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