Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/01/2000
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Application #:
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08991187
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Filing Dt:
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12/16/1997
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Inventors:
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TIEN-YA CHEN, CHEN-CHIU TSENG
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Title:
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METHOD AND CONTROLLING SYSTEM FOR PREVENTING THE SCRATCHING OF WAFER BACKS BY THE FETCH ARM OF A STEPPER MACHINE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 3, LI-HSIN II ROAD, SCIENCE-BASED INDUSTRIAL |
| PARK; HSINCHU CITY, TAIWAN |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT |
| & DUNNER, L.L.P. |
| ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 3, LI-HSIN RD. 2 |
| HSINCHU, TAIWAN R.O.C |
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| HICKMAN STEPHENS COLEMAN & HUGHES, LLP |
| PAUL L. HICKMAN |
| P.O. BOX 52037 |
| PALO ALTO, CALIFORNIA 94303-0746 |
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