Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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09110642
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Filing Dt:
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07/06/1998
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Inventor:
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XUELONG SHI
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Title:
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INFRA-RED RADIATION POST-EXPOSURE BAKE PROCESS FOR CHEMICALLY AMPLIFIED RESIST LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2900 SEMICONDUCTOR DRIVE |
| SANTA CLARA, CALIFORNIA 95051 |
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| LIMBACH & LIMBACH L.L.P. |
| MAYUMI MAEDA |
| 2001 FERRY BLDG. |
| SAN FRANCISCO, CA 94111 |
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Assignment:
2
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| 499 PARK AVENUE |
| NEW YORK, NEW YORK 10022 |
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| SHEARMAN & STERLING |
| ANTOINETTE E. BAKER |
| 599 LEXINGTON AVENUE |
| NEW YORK, NY 10022 |
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Assignment:
3
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RELEASE OF SECURITY INTEREST
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| 210 BOYLSTON STREET |
| CHESTNUT HILL, MASSACHUSETTS 02467 |
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| SCHIFF HARDIN & WAITE |
| CHRIS L. BOLLINGER |
| 6600 SEARS TOWER |
| CHICAGO, IL 60606 |
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