Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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09081596
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Filing Dt:
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05/20/1998
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Inventors:
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HIROYUKI ITO, XUE-YU QIAN, ROBERT J. MITCHELL, STEPHEN MOFFATT
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Title:
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ELECTRON FLOOD APPARATUS FOR NEUTRALISING CHARGE BUILD-UP ON A SUBSTRATE DURING ION IMPLANTATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| JOHN A. CASTELLANO |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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