Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/29/2000
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Application #:
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09125336
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Filing Dt:
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08/14/1998
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Inventors:
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WATARU OHKASE, KAZUTSUGU AOKI, MASAAKI HASEI
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Title:
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WAFER PROCESSING APPARATUS WITH A PROCESSING VESSEL,UPPER AND LOWER SEPARATELY SEALED HEATING VESSELS, AND MEANS FOR MAINTAINING THE VESSELS AT PREDETERMINED PRESSURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-6, AKASAKA 5-CHOME |
MINATO-KU, TOKYO-TO, JAPAN |
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BEVERIDGE, DEGRANDI, WEILACHER ET AL |
ROBERT G. WEILACHER |
1850 M STREET, N.W. |
SUITE 800 |
WASHINGTON, D.C. 20036 |
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