Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/05/2000
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Application #:
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09240460
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Filing Dt:
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01/29/1999
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Inventor:
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CHIH-LUNG LIN
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Title:
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APPARATUS AND METHOD FOR CONTROLLING POLISHING PROFILE IN CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 121, PARK AVENUE 3 |
| HSIN-CHU, TAIWAN, CHINA |
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| TUNG & ASSOCIATES |
| RANDY W. TUNG |
| 838 W. LONG LAKE ROAD |
| BLOOMFIELD HILLS, MI 48032 |
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