Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09264216
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Filing Dt:
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03/05/1999
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Inventors:
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YUJI KAMIKAWA, SATOSHI NAKASHIMA
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Title:
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SYSTEM FOR DRYING SEMICONDUCTOR WAFERS USING ULTRASONIC OR LOW FREQUENCY VIBRATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| SMITH, GAMBRELL & RUSSELL, L.L.P. |
| MICHAEL A. MAKUCH |
| 1850 M STREET N.W., (SUITE 800) |
| WASHINGTON, DC 20036 |
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