Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/19/2000
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Application #:
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09248993
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Filing Dt:
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02/12/1999
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Inventors:
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KIYOSHI SUZUKI, HISASHI MASUMURA, TERUAKI FUKAMI
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Title:
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POLISHING METHOD FOR SEMICONDUCTOR WAFER AND POLISHING PAD USED THEREIN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TOGINBIRU, 4-2, MARUNOUCHI 1-CHOME |
| CHIYODA-KU, TOKYO, JAPAN |
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| EVENSON, MCKEOWN, EDWARDS, ETAL |
| J.D. EVANS |
| 1200 G STREET, N.W., SUITE 700 |
| WASHINGTON, D.C. 20005 |
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