Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/26/2000
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Application #:
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08872123
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Filing Dt:
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05/16/1997
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Inventors:
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MEREDITH J. WILLIAMS, DAVID S. BALLANCE, BENJAMIN BIERMAN, PAUL DEATON, BRIAN HAAS et al
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Title:
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METHOD AND APPARATUS FOR ACHIEVING TEMPERATURE UNIFORMITY OF A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95050 |
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| APPLIED MATERIALS, INC. |
| MARK D. WIECZOREK |
| LEGAL AFFAIRS DEPARTMENT, PATENT COUNSEL |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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