Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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09/26/2000
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Application #:
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09206642
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Filing Dt:
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12/07/1998
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Inventors:
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WEI-CHIH LIN, MING-SHENG KAO, MING-LI KUNG, CHIH-MING LIN
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Title:
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METHOD FOR IMPROVING ETCH UNIFORMITY DURING A WET ETCHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 3F, NO. 19, LI HSIN RD. |
| HSINCHU, TAIWAN R.O.C |
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 19, LI HSIN RD. |
| HSINCHU, TAIWAN R.O.C |
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| WITTELSBACHERPLATZ 2, D-80333 |
| SIEMENS AG |
| MUNCHEN, GERMANY |
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| CARR & FERRELL LLP |
| EPPA, HITE |
| 2225 EAST BAYSHORE ROAD |
| SUITE 200 |
| PALO ALTO, CA 94303 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AM CAMPEON 1-12 |
| NEUBIBERG, GERMANY 85579 |
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| IRIS DRUCKENBROD |
| AM CAMPEON 1-12 |
| PATENT DEPARTMENT MUC/11.2.348 |
| NEUBIBERG, 85579 GERMANY |
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Assignment:
3
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NUNC PRO TUNC ASSIGNMENT (SEE DOCUMENT FOR DETAILS).
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| AM CAMPEON 1-12 |
| NEUBIBERG, GERMANY 85579 |
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| IRIS DRUCKENBROD |
| AM CAMPEON 1-12 |
| PATENT DEPARTMENT MUC/11.2.348 |
| NEUBIBERG, 85579 GERMANY |
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