Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/03/2000
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Application #:
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09310132
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Filing Dt:
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05/12/1999
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Inventors:
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HIROSHI SHINRIKI, YIJUN LIU, MASHITO SUGIURA
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Title:
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SINGLE-SUBSTRATE-PROCESSING CVD APPARATUS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER ET AL |
| NORMAN F. OBLON |
| 1755 JEFFERSON DAVIS HIGHWAY |
| FOURTH FLOOR |
| ARLINGTON, VA 22202 |
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