Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/10/2000
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Application #:
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08808805
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Filing Dt:
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02/28/1997
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Inventors:
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TETSUNORI KAJI, SHINICHI TACHI, TORU OTSUBO, KATSUYA WATANABE, KATSUHIKO MITANI et al
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME |
| CHIHYODA-KU, TOKYO, JAPAN |
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| ANTONOELLI, TERRY, STOUT & KRAUS, LLP |
| GREGORY E. MONTONE |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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