Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/17/2000
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Application #:
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08897439
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Filing Dt:
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07/21/1997
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Inventors:
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SETSU SUZUKI, JUNICHI AOKI, KAZUO MAEDA
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Title:
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METHOD OF FORMING A FILM BY USING PLASMANIZED PROCESS GAS CONTAINING GASEOUS H20 AND AN AUXILIARY GAS IN A SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-28 MITA 3-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| 13-29 KONAN 2-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| LORUSSO & LOUD |
| GEORGE A. LOUD |
| 3137 MT. VERNON AVENUE |
| ALEXANDRIA, VA 22305 |
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