Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09085322
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Filing Dt:
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05/26/1998
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Inventor:
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CHANG-HUI CHEN
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Title:
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INSITU PLASMA CLEAN FOR TUNGSTEN ETCHING BACK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 410 DALLAS, TX 75221 |
| 8350 N. CENTRAL EXPRESSWAY |
| DALLAS, TEXAS 75206 |
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| FINA TECHNOLOGY, IN. |
| JIMMY D. WHEELINGTON |
| P.O. BOX 410 |
| DALLAS, TX 75221 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 9. LI-HIN ROAD |
| HSINCHU, TAIWAN R.O.C |
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| CHRISTENSEN O'CONNOR JOHNSON & KINDNESS |
| CHUN M. NG, ESQ. |
| 1420 FIFTH AVENUE |
| SUITE 2800 |
| SEATTLE, WA 98101-2347 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 121, PARK AVE., II |
| HSIN-CHU 300, TAIWAN R.O.C |
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| THOMAS, KAYDEN, HORSTEMEYER, ET AL. |
| DANIEL R. MCCLURE |
| 100 GALLERIA PARKWAY, SUITE 1750 |
| ATLANTA, GA 30339 |
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