Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/31/2000
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Application #:
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08474009
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Filing Dt:
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06/07/1995
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Inventors:
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ANWAR HUSAIN, HAMID NOORBAKHSH
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Title:
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METHOD AND APPARATUS FOR CONTROLLING A TEMPERATURE OF A WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| JAMES W. PETERSON |
| BURNS, DOANE, SWECKER & MATHIS |
| POST OFFICE BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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