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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
Issue Dt:
11/07/2000
Application #:
08924282
Filing Dt:
09/05/1997
Inventor:
HIDEYUKI SHOJI
Title:
APPARATUS AND METHOD FOR DRY ETCHING
Assignment: 1
Reel/Frame:
008789/0692Recorded: 09/05/1997Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
08/28/1997
Assignee:
7-1, SHIBA 5-CHOME, MINATO-KU
TOKYO, JAPAN
Correspondent:
FOLEY, HOAG & ELIOT LLP
DONALD W. MUIRHEAD
PATENT GROUP
ONE POST OFFICE SQUARE
BOSTON, MASSACHUSETTS 02109-2170
Assignment: 2
Reel/Frame:
013751/0721Recorded: 02/25/2003Pages: 30
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
11/01/2002
Assignee:
1753 SHIMONUMABE, NAKAHARA-KU
KAWASAKI, KANAGAWA 211-8668, JAPAN
Correspondent:
SUGHRUE MION, PLLC
2100 PENNSYLVANIA AVENUE, N.W.
WASHINGTON, DC 20037
Assignment: 3
Reel/Frame:
025183/0589Recorded: 10/22/2010Pages: 9
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
04/01/2010
Assignee:
1753 SHIMONUMABE, NAKAHARA-KU,
KAWASAKI-SHI, KANAGAWA, JAPAN 211-8668
Correspondent:
SUGHRUE MION, PLLC
2100 PENNSYLVANIA AVENUE, N.W.
SUITE 800
WASHINGTON, DC 20037

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