Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/14/2000
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Application #:
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09172140
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Filing Dt:
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10/14/1998
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Inventors:
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SUNG-BUM CHO, HAK-PIL KIM, EUN-HEE SHIN, BAIK-SOON CHOI
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Title:
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PLASMA PROCESS APPARATUS WITH IN SITU MONITORING, MONITORING METHOD, AND IN SITU RESIDUE CLEANING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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416, MAETAN-DONG, PALDAL-GU |
SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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JONES & VOLENTINE, L.L.P. |
RAYMOND C. JONES |
12200 SUNRISE VALLEY DR. |
SUITE 150 |
RESTON, VA 20191 |
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