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Patent Assignment Abstract of Title

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Total Assignments: 4

Patent #:	6151115	Issue Dt:	11/21/2000	Application #:	09361780	Filing Dt:	07/26/1999
Inventor:	PATRICK NAULLEAU
Title:	PHASE-SHIFTING POINT DIFFRACTION INTERFEROMETER FOCUS-AID ENHANCED MASK

Assignment: 1

Reel/Frame:

011846/0160

Recorded: 05/29/2001

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

CALIFORNIA, UNIVERSITY OF

Exec Dt:

03/09/2001

Assignee:

U.S. DEPARTMENT OF ENERGY

P.O. BOX 808 (L-376)

LIVERMORE, CALIFORNIA 94550

Correspondent:

U.S. DEPARTMENT OF ENERGY

WILLIAM C. DAUBENSPECK

LAWRENCE LIVERMORE NATIONAL LABORATORY

P.O. BOX 828 (MS L-376)

LIVERMORE, CA 94550

Assignment: 2

Reel/Frame:

014772/0758

Recorded: 12/10/2003

Pages: 2

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

NAULLEAU, PATRICK

Exec Dt:

12/02/2003

Assignee:

REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE

1111 FRANKLIN STREET, 12TH FLR

OAKLAND, CALIFORNIA 94607-5200

Correspondent:

LAWRENCE BERKELEY NATIONAL LABORATORY

HADIYAH MUHAMMAD

LABORATORY COUNSEL, PATENT DEPT

1 CYCLOTRON RD., M/S 90B

BERKELEY, CA 94720

Assignment: 3

Reel/Frame:

014601/0343

Recorded: 05/05/2004

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE

Exec Dt:

12/17/2003

Assignee:

EUV LLC

2200 MISSION COLLEGE BLVD.

INTEL CORPORATION MAIL STOP SC1-01

SANTA CLARA, CALIFORNIA 95054

Correspondent:

FLIESLER MEYER, LLP

FOUR EMBARCADERO CENTER

SUITE 400

SAN FRANCISCO, CA 94111

Assignment: 4

Reel/Frame:

015552/0067

Recorded: 07/12/2004

Pages: 8

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT SERIAL NUMBER 09632831, 09099389 AND 09956180 NUMBER SHOULD BE 09632631, 09627533 AND 09956160. PREVIOUSLY RECORDED ON REEL 014601 FRAME 0343.

Assignor:

REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE

Exec Dt:

12/17/2003

Assignee:

EUV LLC

2200 MISSION COLLEGE BLVD.

INTEL CORPORATION MAIL STOP SC1-01

SANTA CLARA, CALIFORNIA 95054

Correspondent:

FLIESLER MEYER LLP

CHARLES H. JEW

FOUR EMBARADERO CENTER

FOURTH FLOOR

SAN FRANCISCO, CA 94111

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