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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
11/28/2000
Application #:
09035325
Filing Dt:
03/05/1998
Inventors:
TADAHIRO OHMI, MASAKI HIRAYAMA, HARUYUKI TAKANO, YUSUKE HIRAYAMA
Title:
PARALLEL PLATE SPUTTERING DEVICE WITH RF POWERED AUXILIARY ELECTRODES AND APPLIED EXTERNAL MAGNETIC FIELD
Assignment: 1
Reel/Frame:
009060/0562Recorded: 03/27/1998Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/12/1998
Exec Dt:
03/12/1998
Exec Dt:
03/12/1998
Assignee:
1-17-301, KOMEGABUKURO 2-CHOME AOBA-KU, SENDAI-SHI
MIYAGI-KEN 980, JAPAN
Correspondent:
RANDALL J. KNUTH
3510-A STELLHORN ROAD
FORT WAYNE, IN 46815-4631
Assignment: 2
Reel/Frame:
017215/0184Recorded: 12/29/2005Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
08/27/2005
Assignee:
586-9, USHIGAFUCHI AKATSUKA, TSUKUBA-CITY
IBARAKI PREFECTURE, JAPAN 305-0062
Correspondent:
PHILLIP J. ARTICOLA
FOLEY & LARDNER LLP
WASHINGTON HARBOUR
3000 K STREET, N.W., SUITE 500
WASHINGTON, D.C. 20007-5143

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