Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/28/2000
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Application #:
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09240415
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Filing Dt:
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01/29/1999
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Inventors:
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JEN-YUAN YANG, MING-SHUO YEN, TSAI-YI CHEN, WEN-PING LIN, CHUAN-YI WANG
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Title:
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METHOD AND APPARATUS FOR PREVENTING ETCH RATE DROP AFTER MACHINE IDLE IN PLASMA ETCH CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 121, PARK AVENUE 3 |
| HSIN-CHU, R.O.C., TAIWAN |
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| TUNG & ASSOCIATES |
| RANDY W. TUNG |
| 838 W. LONG LAKE ROAD |
| BLOOMFIELD HILLS, MICHIGAN 48032 |
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