Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/19/2000
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Application #:
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09227029
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Filing Dt:
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01/07/1999
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Inventors:
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LIMING ZHANG, YUEXING ZHAO, DIANE HYMES, WILBUR C. KRUSELL
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Title:
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METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR SUBSTRATES AFTER POLISHING OF COPPER FILM
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Assignment:
1
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MERGER (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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MARTINE PENILLA & KIM LLP |
PETER B. MARTINE |
710 LAKEWAY DRIVE |
SUITE 170 |
SUNNYVALE, CA 94086 |
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