Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/19/2000
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Application #:
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09158943
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Filing Dt:
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09/21/1998
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Inventors:
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THOMAS E. FELTER, GLENN D. KUBIAK
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Title:
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METHOD FOR EXTREME ULTRAVIOLET LITHOGRAPHY
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Assignment:
1
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| 1000 INDEPENDENCE AVENUE, S.W. |
| WASHINGTON, DISTRICT OF COLUMBIA 20585-0162 |
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| U.S. DEPARTMENT OF ENERGY |
| BETTY A. WINCHESTER |
| 1000 INDEPENDENCE AVENUE, S.W. |
| WASHINGTON, DC 20585-0162 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 969 |
| LIVERMORE, CALIFORNIA 94551 |
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| SANDIA NATIONAL LABS, MS 9031 |
| KURT C. OLSEN |
| P. O. BOX 969 |
| LIVERMORE, CA 94551-0969 |
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