Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/26/2000
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Application #:
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08648254
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Filing Dt:
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05/13/1996
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Inventors:
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KENNETH S. COLLINS, MICHAEL RICE, JOHN TROW, DOUGLAS BUCHBERGER, CRAIG A. RODERICK
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Title:
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INDUCTIVELY COUPLED RF PLASMA REACTOR HAVING AN OVERHEAD SOLENOIDAL ANTENNA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT COUNSEL |
| 3050 BOWERS AVENUE P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95051 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| 3050 BOWERS AVE. |
| PATENT COUNSEL P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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