Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/23/2001
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Application #:
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08890743
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Filing Dt:
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07/11/1997
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Inventors:
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QUANYUAN SHANG, ROBERT MCCORMICK ROBERTSON, KAM S. LAW, JAMES T. GARDNER
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Title:
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METHOD AND APPARATUS FOR ELECTROSTATICALLY MAINTAINING SUBSTRATE FLATNESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1, 7 BAN 2-CHOME, NISHISHINJUKU |
| TOKYO, JAPAN |
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| APPLIED MATERIALS, INC. |
| MARK D. WIECZOREK |
| PATENT COUNSEL, LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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